Nhanganyaya
Mundima yemazuva ano tekinoroji yekunzwa, piezoresistive pressure sensors inomira pachena nekuda kwechokwadi, kuvimbika, uye kuita zvakasiyana. Aya masensor anoshandisa piezoresistive mhedzisiro kuyera kudzvanywa shanduko uye kuita basa rakakosha mune rakasiyana siyana rekushandisa kubva kumaindasitiri otomatiki kusvika pakutariswa kwekurapa. Ichi chinyorwa chinotarisa mune izvo zvakakosha zvepiezoresistive pressure sensors, kusanganisira misimboti, mhando, mashandisirwo, zvakanakira, uye kufunga kwekushandisa.
Kunzwisisa Piezoresistive Pressure Sensors
Iyo Nheyo yePiezoresistance
Iyo piezoresistive mhedzisiro chiitiko chemuviri apo kupokana kwemagetsi kwechinhu kunoshanduka nekuda kwekushushikana kwemagetsi. Mhedzisiro iyi inoshandiswa zvakanyanya mumasensa akasiyana-siyana, senge pressure sensors, accelerometers, force sensors, uye torque sensors, inoshanda nekushandura huwandu hwemuviri kuita masaini emagetsi. Ivo vanokwidziridza kunzwisiswa kwepamusoro, kuyera kuyerwa kwakakura, kukurumidza frequency mhinduro, uye zvakanakira chimiro chakareruka uye mutengo wakaderera wepiezoresistive mhedzisiro.
Zvikamu uye Zvishandiso
Piezoresistive pressure sensors inonyanya kushanda kuburikidza nechikamu chayo chepakati, membrane inonzwa kana diaphragm yakagadzirwa kubva kune zvinhu zvakaita se-single-crystal silicon, polysilicon, kana simbi mafirimu. Kana iyo membrane inokanganisa pasi pekumanikidzwa, iyo inokonzeresa kushushikana kwemagetsi inoshandura kupikisa kwayo kwemagetsi, kushandura shanduko yekumanikidza kuita masaini emagetsi. Sarudzo yechinhu uye dhizaini ye membrane, kusanganisira chimiro chayo, ukobvu, uye chimiro, inokanganisa zvakanyanya kunzwa kwe sensor, kuyerwa kwechiyero, tembiricha maitiro, mutsara, uye kugadzikana.
Single-crystal silicon inoshandiswa zvakanyanya kune yayo yakakwirira piezoresistive coefficient uye senitivity, pasinei nekunzwa kwayo kwakasimba kwekushisa; polysilicon uye simbi mafirimu anosarudzwa nekuda kwekushomeka kwavo kwekushisa kwekunzwa kana kugadzikana kwakanaka uye kusagadzikana kwekuora. Kugonesa kuita kunoenderana nedhizaini yeWheatstone bhiriji redunhu uye mashandisirwo etekinoroji yekubhadhara, semubhadharo wetembiricha uye zero-point calibration, kudzikisa kukanganiswa kwekusiyana kwetembiricha uye zero-point drift, nekudaro kunowedzera iko kurongeka uye kugadzikana kwezviyero. .
Mhando dzePiezoresistive Sensors
Piezoresistive pressure sensors yakakamurwa kuita absolute, geji, uye marudzi akasiyana zvichienderana nekuyera kwavo maitiro. Absolute pressure sensors inoshandiswa kuyera kudzvanywa kunoenderana neyakakwana vacuum, inokodzera vacuum masisitimu uye meteorological kuyerwa, inozivikanwa neyakavharwa kamuri chimiro uye yakakura kuyerwa huwandu. Gauge pressure sensors inoyera kudzvinyirirwa kunoenderana nemhepo yemhepo, inoshanda muhydraulic uye pneumatic system, inoratidzwa nemaitiro ayo akareruka uye mutengo wakaderera. Differential pressure sensors inoyera mutsauko uripo pakati pezviviri zvekumanikidza masosi, anoshandiswa zvakanyanya mukuyerera uye nhanho kuyerwa, uye inocherechedzwa nekunyanya kwayo asi chimiro chakaoma.
Kusarudza yakakodzera piezoresistive pressure sensor inosanganisira kutarisa mamiriro ekushandiswa uye kuyerwa kwezvinodiwa, apo ma sensor akazara anopa kurongeka kwepamusoro asi nemutengo wakakwira, majeji sensors anodhura-anodhura asi ane mashoma kuyerwa chiyero, uye akasiyana ma sensors haabatsirwe nekumanikidzwa kwemhepo asi huya pa. mutengo wakakwirira. Pamusoro pezvo, musika unopa ma sensors akasarudzika akagadzirirwa zvinodiwa chaizvo, senge miniature pressure sensors, yakakwirira-tembiricha yekumanikidza sensors, uye corrosion-resistant pressure sensors, imwe neimwe yakanangana nenzvimbo dzakasiyana dzekuyera uye mamiriro.
Iyo Yekushanda Nheyo yePiezoresistive Pressure Sensors
Iyo Sainzi Kuseri kwePiezoresistance
Piezoresistive pressure sensors inoshanda zvichibva pane piezoresistive mhedzisiro, uko kupikisa kwemagetsi kwechinhu kunoshanduka pasi pekushushikana kwemagetsi. Kana dzvinyiriro ikaiswa kune inonzwika membrane kana diaphragm, ichiita kuti iparadze uye ibudise kushushikana kwemagetsi, kushushikana uku kunoshandura kuramba kwemagetsi kwe membrane. Iyo sensor inozoshandura shanduko iyi yekupikisa kuita chiratidzo chemagetsi kuburikidza neWheatstone bhiriji reketi, iyo, mushure mekukwidziridzwa uye kusefa, inoshandurwa kuita inoverengeka yekumanikidza kukosha. Kuita uku kunosanganisira shanduko muchimiro chekristaro, uko kushushikana kwemagetsi kunokanganisa mafambiro erekitironi uye kusungwa kwemutakuri, zvichikonzera shanduko yekuramba.
Zvinhu zvakati wandei zvinopesvedzera kuita kwepiezoresistive pressure sensors, zvinosanganisira piezoresistive material coefficient, tembiricha coefficient, kugadzikana, chimiro che membrane, ukobvu, chimiro, uye dhizaini ye Wheatstone bridge circuit uye mashandisirwo etekinoroji yemuripo semuripo wetembiricha uye zero- point calibration. Iyo piezoresistive coefficient ndiyo yakakosha parameter inoratidza kusimba kweiyo piezoresistive mhedzisiro, nepo Wheatstone bhiriji idunhu rakakosha rekunyatso shandura shanduko yekuramba kuita masaini emagetsi, kuvandudza iko kurongeka uye kugadzikana kwezviyero.
Zvikumbiro zvePiezoresistive Pressure Sensors
Piezoresistive pressure sensors inoshandiswa zvakanyanya munzvimbo dzakasiyana siyana dzakadai sekutonga kwemaindasitiri, zviridzwa zvekurapa, mota dzemagetsi, uye aerospace nekuda kwekunzwa kwavo kwakanyanya, kuyera kuyerwa kwakakura, kukurumidza frequency mhinduro, chimiro chakareruka, uye mutengo wakaderera. Aya ma sensors anotarisisa kudzvanywa mu hydraulic uye pneumatic masisitimu muindasitiri yekugadzira, kuyera torque uye kudzvanywa mumarobhoti majoini, uye kuve nechokwadi chekuchengetedza uye kugona kwemaitiro ekugadzira mupetrochemical, simba, uye metallurgical maindasitiri.
Mundima yezvekurapa, piezoresistive pressure sensors inoshandiswa kutarisa zvakakomba ma parameters senge blood pressure, kuyerera kweropa, uye kufema BP, ichipa tsigiro yakakosha yehunyanzvi yekuongorora ventricular pressure, intracranial pressure, uye kudzvinyirirwa kweziso. Ivo zvakare vanotamba zvinzvimbo mumatekinoroji ehutano anopfekeka nekutarisa kuita kwemuviri uye kunaka kwekurara. Muindasitiri yemotokari, masensa aya anoyera tsinga yevhiri, kusimba kweinjini, uye kufurirwa kwemafuta, asi ari muchadenga, anotsigira kuyerwa kwakaringana kwekukwira kwendege, kumhanya kwemhepo, uye kumanikidzwa kweinjini.
Kupfuura nzvimbo idzi, piezoresistive pressure sensors inoitawo basa rakakosha mukutarisisa kwezvakatipoteredza uye tsvakiridzo yesainzi, kuyera kumanikidzwa kwemhepo, mazinga emvura, uye kumhanya kwemhepo, uye nekupa chaiyo data yezvigadzirwa zvemagetsi uye fluid dynamics zvidzidzo. Izvo zvakasiyana-siyana zvekushandisa zveaya ma sensors anosimbisa chinzvimbo chavo chakakosha muhunyanzvi hwemazuva ano uye kusimudzira maindasitiri, zvichivaita tekinoroji yakakosha yeinoshanda, chaiyo yekutarisa uye kutonga.
Zvakanakira zvePiezoresistive Pressure Sensors
Piezoresistive pressure sensors, nekunzwa kwavo kwakanyanya uye kurongeka, kuwanda kwekushanda uye kuyera kwakafara chiyero, chimiro chakareruka, uye mutengo wakaderera, vanoita basa rinokosha munzvimbo dzakasiyana siyana. Aya masensor anogona kuona kudiki-diki shanduko yekuchinja, ichiita kuti ive yakakodzera kune yakakwira-chaiyo yekuyera maapplication, sekutarisa BP uye kubuda kweropa mukutarisisa kwekurapa. Iwo anogona zvakare kugadzirwa kuti asangane nezvinodiwa zveakasiyana dzvinyiriro kubva kumicro pascals kusvika megapascals, zvichiratidza kushanda kwavo kwakakura mumaindasitiri ekudzora masisitimu, mota dzemagetsi, aerospace, nedzimwe nzvimbo.
Iyo yekugadzira nzira yepiezoresistive pressure sensors iri nyore uye isingadhure, yakasanganiswa nehukuru hwayo compact, kukurumidza frequency mhinduro, kugadzikana kwenguva refu, uye yakasimba anti-kupindira kugona, zvichiita kuti zvive nyore kuchengetedza uye kutsiva, nepo yakakodzera kuyerwa kwakasimba uye kwakaoma. kuchengetedzwa kwemamiriro ekunze. Aya maitiro haangodzikisi mutengo wese wekushanda chete asiwo anovimbisa kushanda kwakanaka uye kwakavimbika kwehurongwa.
Zvinogumira uye Zvinofungwa
Nepo piezoresistive pressure sensors ichishandiswa zvakanyanya mumaindasitiri akasiyana nekuda kwekunzwa kwavo kwepamusoro, hupamhi hwekuyera huwandu, chimiro chakareruka, uye mutengo-kushanda, kushandiswa kwavo kunouyawo nenhevedzano yezvipimo zvinoda kutariswa mukushandisa zvinoshanda. Zvinhu zvakatipoteredza zvakadai sekushisa, humidity, uye vibration zvinonyanya kukanganisa kushanda kwesensor, zvinogona kutungamirira kukuchinja kwekunzwa, zero-point drift, uye kuderera kwechiyero chekuenzanisa. Pamusoro pezvo, kunzwisiswa kwepamusoro kwepiezoresistive sensors, kunyangwe zvichivagonesa kuona shanduko yemaminiti ekumanikidza, inoitawo kuti iwedzere kukanganiswa nekukanganiswa kweruzha.
Kugadzirisa matambudziko aya, kutora matanho akakodzera emuripo wetembiricha, nzira dzekudzivirira kuzunguzika, uye kuenzanisa nguva dzose kunogona kuvandudza zvakanyanya kuyerwa uye kugadzikana kwemasensa. Kunyangwe piezoresistive pressure sensors ine zvimwe zvipimo muchiyero chekuyera uye kuenderana nevezvenhau, kusarudza iyo yakakodzera sensor mhando uye modhi uye kugadzira masensa enzvimbo dzekushandisa chaiko kunogona kudzikisira zvipimo izvi. Zvakare, nepo yakakwira-chaiyo piezoresistive pressure sensors ichidhura, kuisa mari mumasensa akakodzera uye kutora matanho anoenderana ekugadzirisa anogona kusimudzira kuita kwese uye kuvimbika kwehurongwa mukufamba kwenguva.
Muchidimbu, kunyangwe paine zvimwe zvisingakwanisi, piezoresistive pressure sensors inogona kuwedzera zvakanakira uye kusangana nezvinodiwa zveakasiyana maapplication akaomesesa kuburikidza nekusarudzika sarudzo uye chaiyo dhizaini yekushandisa. Izvi zvinoda kuti vashandisi vatarise zvizere ma paramita akakosha akadai sezvakatipoteredza, kuyerwa kwehuwandu, uye kuenderana nenhau panguva yekusarudza nekushandisa, uye kutora matanho anoenderana nekuona chokwadi uye kugadzikana kwemasensa.
Zvitsva muPiezoresistive Pressure Sensing Technology
Kufambira mberi mune Zvishandiso uye Tekinoroji
Kuenderera mberi kuri kuita sainzi uye tekinoroji kuri kushandura kusimukira kwepiezoresistive pressure sensors, zvinonyanya kuratidzwa mukugadzirwa kwezvinhu zvitsva zvepiezoresistive, mashandisirwo ehunyanzvi hwekugadzira microfabrication, kubatanidzwa kwemuripo uye tekinoroji dzisina waya, uye kubatanidzwa kwehunyanzvi hwehungwaru. Zvitsva zvepiezoresistive zvakadai senanomaterials uye semiconductor zvinhu hazvisi kungopa yakakwirira piezoresistive coefficients uye yakadzika tembiricha coefficients asiwo inowedzera kugadzikana kwe sensor, zvakanyanya kuvandudza sensor senitivity uye kurongeka.
Iko kushandiswa kweiyo microfabrication tekinoroji inogonesa kugadzirwa kwediki, yakakwira-chaiyo yekumanikidza sensors, kuderedza mutengo uye kuwedzera kugadzirwa kwehunyanzvi, zvichibvumira masensa kuti aiswe muhuwandu hwakawanda hwemamiriro ekushandisa. Zvakare, matekinoroji emubhadharo epamberi semuripo wetembiricha uye zero-point Drift muripo anovandudza huroyi nekugadzikana kwezviyero. Iko kubatanidzwa kweasina waya tekinoroji kunoitawo kuti kufambiswa kwedata kuve nyore, kunowedzera kuchinjika kwekumisikidza uye kushandisa nekuvandudza kuchengetedzwa kwehurongwa.
Ramangwana Kutungamira kwe Pressure Sensing Technology
Hungwaru matekinoroji, kubatanidza tekinoroji yekunzwa, microelectronics tekinoroji, uye tekinoroji yekombuta, iri kutyaira piezoresistive pressure sensors kune imwe budiriro yehungwaru. Izvi hazvingoone kuyerwa kwehungwaru, ongororo yedata, uye kukanganisa mabasa ekuongorora asi zvakare zvinonyanya kusimudzira kugona uye kukosha kwemasensor mumashandisirwo anoshanda. Semuenzaniso, kushandiswa kwemananomaterials kunonatsiridza zvakanyanya kunzwa uye kuyerwa kwechiyero, tekinoroji yeMEMS inoona sensor miniaturization uye kuderedzwa kwemutengo, tekinoroji yedhijitari yekugadziridza tekinoroji inosimudzira zvakanyanya kuyerwa uye kugadzikana, uye isina waya yekunzwa tekinoroji inopa mukana wekutumira data isina waya kune sensors. Kufambira mberi uku pamwe chete kunosimudzira kukurumidza kusimudzira uye kuwedzera kwezvikumbiro zvepiezoresistive pressure sensor tekinoroji.
Kusarudza Yakakodzera Piezoresistive Pressure Sensor
Sarudzo Criteria
Pakusarudza piezoresistive pressure sensor, zvinhu zvakakosha zvakadai seyero renji, kunzwa, uye mamiriro ezvakatipoteredza zvakakosha. Kuve nechokwadi chekuti kuyerwa kwe sensor yakasarudzwa inovhara iyo inodiwa kudzvanywa huwandu hwakakosha kuti udzivise kudarika miganhu yayo yekuita uye kukonzera kuyerwa kukanganisa. Sensitivity chimwe chinhu chinogadzirisa, chinokanganisa zvakananga kuyerwa kwechiyero; saka, kusarudza sensor ine manzwiro akakodzera kune zvinodiwa nemashandisirwo ekushandisa kunodiwa. Pamusoro pezvo, zvinhu zvezvakatipoteredza zvakaita setembiricha, humidity, uye vibration zvinogonawo kukanganisa sensor performance, zvichiita kuti zvive zvakakosha kusarudza masensa anogona kuenderana nemamiriro ekunze ekushandisa.
Kusarudza piezoresistive pressure sensor inokodzera imwe application inodawo kufunga zvimwe zvinhu zvakaita sehukuru, huremu, uye mutengo. Semuyenzaniso, maindasitiri ekudzora mashandisirwo anowanzoda masensa ane hupamhi hwekuyera huwandu, kunzwisiswa kwakanyanya, uye kwakasimba kurwisa-kukanganisa kugona, nepo zviridzwa zvekurapa zvinotungamira kuyera kwechiyero, kugadzikana kwakanaka, uye yakanakisa biocompatibility. Masensa emunda wemagetsi emotokari anofanirwa kuve akakwana, akareruka, akamira tembiricha yakakwira, uye isingaite vibration, nepo masensor enzvimbo yeaerospace anoda kuyera kwakanyanya, kugadzikana, uye neradiation kuramba. Naizvozvo, kunzwisisa uye kuongorora zvinodiwa zvechishandiso chega chega uye kusarudza iyo yakanyatsokodzera piezoresistive pressure sensor modhi yakakosha kuitira kuti uve nechokwadi chekushanda kwehurongwa hwese uye kuvimbika kwenguva refu.
Nguva yekutumira: Mar-12-2024