Kunzwisisa Thin-Film Technology
Tekinoroji yefirimu-tete inosanganisira kuisa ganda rakatetepa rezvinhu (kazhinji kubva pamananomita mashoma kusvika kune mashoma mamicrometer akakora) pane substrate. Aya akaturikidzana anogona kugadzirwa nesimbi, semiconductors, insulators, kana zvimwe zvinhu, uye anoshandiswa kugadzira anoshanda emagetsi zvikamu. Iyi tekinoroji inonyanya kukosha mukugadzira zvigadzirwa zvemagetsi sezvo ichigonesa kurongeka kwepamusoro uye kushanda kwezvikamu. Thin-firimu deposition inowanzoitwa kuburikidza nemuviri vapor deposition (PVD) kana kemikari vapor deposition (CVD), kuve nechokwadi chemhando uye kushanda kwechigadzirwa chekupedzisira.
Kuvandudzwa kwetekinoroji yefirimu yakatetepa yakatanga pakati pezana ramakore rechi20 apo kufambira mberi kukuru kwakaitwa musainzi yezvinhu uye nzira dzekuisa vacuum. Pakutanga, tekinoroji-yefirimu tekinoroji yainyanya kushandiswa muindasitiri yesemiconductor yekugadzira ma transistors uye akasanganiswa maseketi. Sezvo tekinoroji yakakwira uye kudiwa kwakawedzera, huwandu hwekushandisa hwetekinoroji-yefirimu tekinoroji yakawedzera nekukurumidza. Nhasi, inoshandiswa zvakanyanya mukugadzira sensor, machira emeso, maseru ezuva, hard disk drives, uye anti-corrosion coatings, pakati pevamwe. Semuenzaniso, mukugadzira sensor, tekinoroji yefirimu yakaonda inoshandiswa kugadzira ma sensors ekumanikidza, magasi sensors, uye tembiricha sensors, iyo inoratidzirwa nekunzwa kwakanyanya uye kurongeka. Pamusoro pezvo, kushandiswa kwetekinoroji-yefirimu tekinoroji mune microelectromechanical masisitimu (MEMS) uye nanotechnology iri kukura zvakare, ichipa rubatsiro rwakakosha rwekuvandudza nekusimudzira muminda iyi.
Zvinhu zvakakosha zvetekinoroji-yefirimu tekinoroji zvinosanganisira kurongeka kwayo kwakanyanya, kuchinjika, uye akawanda-basa rekubatanidza kugona. Kurongeka kwepamusoro kunobvumira tekinoroji-yefirimu tekinoroji kuti iwane zviyero zvakaringana mukati mehukuru hudiki, izvo zvakakosha kumidziyo yakaita sedhivha sensors inoda kuchengetedza zviyero zvakaringana zvekumanikidza pasi pemamiriro akasiyana ezvakatipoteredza. Iko kuchinjika kwemafirimu akaonda anovabvumira kuchinjika kune akasiyana ma substrates uye zvinodiwa zvekushandisa, zvichigonesa kuiswa pane akasiyana substrates sesilicon, girazi, simbi, uye mapurasitiki, nekudaro kuwana akawanda mabasa. Uyezve, tekinoroji-yefirimu tekinoroji inogona kubatanidzwa nehumwe matekinoroji uye zvigadzirwa kugadzira inoumbwa michina ine akawanda mabasa. Semuyenzaniso, kubatanidza tekinoroji-yefirimu tekinoroji neMEMS inogona kuburitsa madiki ekumanikidza masensa ayo asiri madiki uye akareruka chete asiwo ane hanya zvakanyanya uye akavimbika.
Tekinoroji-yefirimu tekinoroji zvakare inogona kubatanidza mabasa akawanda mumudziyo mumwe chete, zvichireva kuti kunzwa, kuyerwa, uye kugadzirisa data kunogona kuwanikwa panguva imwe chete mukati memutsetse wakatetepa-firimu, kurerutsa dhizaini nekugadzira maitiro emudziyo. Uku kugona kwekubatanidza hakungowedzere kuita kwechigadzirwa uye kuvimbika asiwo kunoderedza mutengo wekugadzira uye kuoma. Mukuvandudza kwema sensors ekudzvinyirira, tekinoroji-yefirimu tekinoroji inogona kuvandudza zvakanyanya sensor performance, ichivabvumira kushanda zvakatsiga munzvimbo dzakasiyana dzakaoma.
Kubatanidzwa kweThin-Film Technology muPressure Sensors
Iko kubatanidzwa kweiyo yakatetepa-firimu tekinoroji mukumanikidza sensors ine chinangwa chekusimudzira mashandiro, kuderedza saizi, uye kuwedzera kunzwa. Nekunyatso kudzora zvivakwa zvezvinhu uye kukora kwemutsetse, tekinoroji-yefirimu inoita kuti kusimudzira kwepamusoro-chaiyo sensors kugoneke. Kubatanidzwa uku hakungonatsiridza kuita kwese kwema sensors asiwo kunounza zvakakosha zvakati wandei zvinhu zvakakosha.
Chekutanga, tekinoroji-yefirimu tekinoroji inogonesa miniaturization yemasensor. Masensa echinyakare anodzvanyirira anowanzo kutarisana nemipimo muhukuru uye huremu, nepo tekinoroji-yefirimu inobvumira kugadzirwa kwemadiki, akareruka masensa pasina kukanganisa kuita. Izvi zvakanyanya kukosha kune zvikumbiro zvine nzvimbo shoma kana zvinoda zvigadziriso zvisingaremi, senge michina yekurapa neMEMS.
Chechipiri, masensa akaonda-firimu anokunda mukuwedzera kunzwa. Thin-firimu tekinoroji inokwanisa kuona shanduko yemaminiti ekumanikidza nehupamhi hwepamusoro, ichiita kuti masensa aya abatsire munzvimbo dzinoda kuyerwa chaiko. Semuyenzaniso, muindasitiri otomatiki uye yekutarisa kwezvakatipoteredza, yakaonda-firimu kudzvanywa sensors inogona kupa chaiyo data, nekudaro inovandudza yakazara sisitimu kunyatsoshanda uye kuvimbika.
Uyezve, tekinoroji-yefirimu tekinoroji inovandudza kuvimbika uye kusimba kwema sensors ekumanikidza. Kufanana kwepamusoro uye kugadzikana kwezvikamu zvakatetepa-firimu zvinovimbisa kushanda kwakafanana pamusoro pekushandiswa kwenguva refu. Kuenzaniswa nemasensa echinyakare, matete-firimu sensors anogona kuchengetedza kuita kwakanaka kunyangwe pasi pemamiriro ekunze akanyanya, zvichiita kuti zvishande zvakanyanya muminda yakadai seaerospace uye maindasitiri emotokari.
Kuenzaniswa nemaitiro echinyakare, tekinoroji-yefirimu tekinoroji inopa yakareruka, compact, uye yakanyanya kunzwa imwe nzira. Masensa echinyakare ekumanikidza anowanzo kutarisana nematambudziko muhukuru, uremu, uye nemazvo, nepo tekinoroji yefirimu-tete, nehukuru hwezvinhu uye maitiro ekugadzira, inokunda izvi zvisingakwanisi. Masensa akaonda-firimu haana chete mabhenefiti muhukuru uye huremu asiwo zvakanyanya kupfuura echinyakare sensors maererano nekunyatso uye kunzwa. Aya mabhenefiti anoita kuti tekinoroji-yefirimu ive chikamu chakakosha chekuvandudza tekinoroji yemazuva ano sensor.
Zvishandiso zveThin-Film Pressure Sensors
Sarudzo yezvishandiso zveyakaonda-firimu kumanikidza sensors kwakakosha sezvo zvinhu izvi zvinokanganisa zvakananga kuita uye kuvimbika kwema sensors.
Common Materials
Zvishandiso zvakajairika zvinoshandiswa mukuonda-firimu kumanikidza masensa zvinosanganisira simbi dzakaita segoridhe, platinamu, uye aruminiyamu, inozivikanwa nekunaka kwayo conductivity uye kusaita ngura. Ndarama, sechinhu chinoitisa zvakanyanya, inowanzoshandiswa muzvikamu zve electrode zve sensors kuti ive nechokwadi chekurongeka uye kugadzikana kwekufambiswa kwechiratidzo. Platinamu, nekuda kwekudzikama kwayo kwekupisa uye kushongedzwa kweoxidation, inoshandiswa zvakanyanya mumasensa enzvimbo dzepamusoro-tembiricha. Aluminium, kuve yakareruka uye ine yakanaka conductivity, inowanzoshandiswa mumasensor application inoda uremu kudzora. Pamusoro pezvo, semiconductor zvinhu zvakaita sesilicon uye germanium zvinoshandiswa zvakanyanya mutete-firimu kudzvanywa sensors nekuda kwezvakanaka zvemakina ezvivakwa uye kunzwa, kutamba basa rinokosha muMEMS.
Advanced Materials
Nekuvandudzwa kwetekinoroji, zvinhu zvepamberi senge nanocomposites uye graphene zviri kuwedzera kutarisisa kwekushandisa kwavo mune dzakatetepa-firimu pressure sensors. Izvi zvinhu zvinotsvagirwa zvakanyanya kune zvazvo zvakanaka zvivakwa uye mukana wekuwedzera kuwedzera sensor performance. Nanocomposites inosanganisa mabhenefiti emhando dzakasiyana siyana, ichipa epamusoro mechanicha simba uye conductivity, iyo inogona zvakanyanya kuvandudza sensor senitivity uye kusimba. Graphene, iine single-atomu layer dhizaini uye yakatanhamara yemagetsi zvivakwa, inoonekwa seyakanakira sarudzo yeramangwana sensor zvinhu. Haisi chete ine ultra-high conductivity asi zvakare inoratidza yakanakisa mechanical simba uye elasticity, ichiratidza hukuru hunogona mukuvandudza kweakanyanya-sensitive pressure sensors.
Material Properties
Kusarudzwa kwezvinhu zvehutete-firimu kudzvanywa sensors kunoenderana nemagetsi, mechanical, uye thermal zvivakwa kuti ive nechokwadi chekushanda kwakakwana pasi pemamiriro akasiyana ekushanda. Semuenzaniso, masensa anoshandiswa munzvimbo dzepamusoro-tembiricha anoda zvinhu zvine kugadzikana kwekupisa uye oxidation kuramba, nepo zvikumbiro zvinoda kunzwisiswa kwakanyanya funga nezvemagetsi conductivity uye mechanical elasticity modulus yezvinhu. Nekunyatso funga izvi zvivakwa zvezvinhu, vagadziri vanogona kusarudza zvakanyanya akakodzera zvinhu kune chaiwo mashandisirwo ezvinodiwa, kuve nechokwadi chekuvimbika uye kurongeka kwema sensors munzvimbo dzakasiyana dzakaoma.
Dhizaini Yekufunga kune Yakaonda-Film Pressure Sensors
Dhizaini yekufunga kune yakaonda-firimu kumanikidza sensors inovavarira kuve nechokwadi chekuita kwavo, kuvimbika, uye kugadzikana mune akasiyana maapplication.
Structural Design
Iyo dhizaini yedhizaini yakaonda-firimu kudzvanywa sensors inofanirwa kuve nechokwadi chekudzikama kwemuchina uye kusimba uku uchichengetedza kunzwisiswa uye kurongeka. Izvi zvinoda kuti vagadziri vatarise kwete chete chimiro chemuviri mutete firimu asiwo ma mechanika mutoro uye kumanikidzwa kwezvakatipoteredza mumashandisirwo chaiwo. Iyo sensor's dhizaini dhizaini inofanirwa kumira kwakasiyana mekiniki kushushikana uye shanduko yezvakatipoteredza uku uchichengetedza yakagadzikana inobuda chiratidzo.
Sensitivity
Sensitivity chinhu chakakosha mukugadzirwa kwema sensors ekumanikidza, kupesvedzerwa nekusarudzwa kwezvinhu, kutetepa-firimu ukobvu, uye tekinoroji yekugadzira. High-sensitivity sensors inogona kuona shanduko yemaminiti ekumanikidza, yakakosha pakuyera kuyerwa uye kutonga mashandisirwo. Kusarudzwa kwezvinhu kunokanganisa zvakananga sensor sensivity; zvinhu zvakasiyana-siyana zvine maitiro akasiyana-siyana emagetsi uye emagetsi, akakodzera zvakasiyana-siyana zvekushandisa. Mutete-firimu ukobvu zvakare chinhu chakakosha; iyo firimu yakatetepa, iyo yakakwirira yekunzwa, asi izvi zvinogona kuderedza simba remagetsi, zvinoda kuenzanisa pakati pekunzwa uye simba.
Kururama uye Kurongeka
Kuwana kurongeka kwepamusoro uye kurongeka mune dzakatetepa-firimu kudzvanywa sensors kunoda kungwarira dhizaini uye kugadzira maitiro kuti ive nechokwadi chekuyera kuvimbika uye kudzokorora. Izvi zvinosanganisira kunyatso kudzora ukobvu uye kufanana kwefirimu rakatetepa, kusarudza akakodzera substrates, uye optimize kugadzira maitiro. Chero kutsauka kudiki mukuita kwekugadzira kunogona kukanganisa mashandiro e sensor, zvichiita kuti kuomarara kwemhando yekudzora uye kuyedzwa kudikanwa.
Performance Characteristics Nguva Yekupindura
Thin-film pressure sensors inowanzova nenguva yekupindura inokurumidza, yakakosha kune zvine simba zvikumbiro zvinoda chaiyo-nguva yekumanikidza yekutarisisa. Nguva yekupindura yekukurumidza inovimbisa kuti sensor inogona kukurumidza kutora shanduko yekuchinja, ichipa chaiyo-nguva data tsigiro yezvishandiso muminda senge maindasitiri otomatiki, michina yekurapa, uye aerospace.
Durability
Kusarudza zvinhu zvakakodzera uye kutora nzira dzakavimbika dzekugadzira dzinosimudzira kusimba kwematete-firimu kumanikidza sensors, kuve nechokwadi chekuvimbika kwenguva refu. Kugara kwakakosha pakushanda kwakagadzikana kwenguva refu kwemasensa, kunyanya ayo anoshanda munzvimbo dzakaomarara, senge tembiricha yepamusoro, hunyoro hwepamusoro, kana nharaunda dzinoora.
Environmental Kugadzikana
Thin-film pressure sensors inofanirwa kuchengetedza kuita zvinoenderana pasi pezvakasiyana mamiriro ezvakatipoteredza, kusanganisira kushanduka kwetembiricha, humidity, uye kushushikana kwemagetsi. Izvi zvinoda masensa kuti ave nekugadzikana kwakanaka kwezvakatipoteredza, kuve nekukwanisa kushanda mukati mehupamhi hwekushisa, uye kusave nehanya nekuchinja kwehunyoro uye kushushikana kwemagetsi. Kusarudzwa kwezvinhu uye dhizaini yekurongedza inoita basa rakakosha mukuona kugadzikana kwezvakatipoteredza kwema sensors.
Zvishandiso zveThin-Film Pressure Sensors
Muindasitiri yemotokari, dzakatetepa-firimu kudzvanywa sensors dzinoshandiswa mumatairi ekumanikidza ekutarisa masisitimu (TPMS) kupa chaiyo-nguva tire yekumanikidza data, kuwedzera kuchengeteka uye kuita. Mune injini manejimendi masisitimu, ma sensors aya anotarisisa mafuta uye kudzvanywa kwemhepo, kuve nechokwadi chekuita kweinjini yakakwana uye kushanda nesimba. Pamusoro pezvo, masisitimu ekuchengetedza emotokari senge mabhegi emhepo uye mabhureki masisitimu anovimba neakatetepa-firimu kudzvanywa sensors kuti anyatso kudzvanya kuyerwa uye panguva yakakodzera activation.
Munharaunda yezvokurapa, matete-firimu ekudzvinyirira anoshandiswa mumagetsi ekudzivirira kweropa, achipa zviyero zvakarurama uye zvisingasviki zvakakosha pakuchengetwa kwevarwere uye kuongororwa. Iwo zvakare anoshandiswa mune anoisirwa ma sensors ekuenderera mberi physiological yekutarisa, kugadzirisa murwere kurapwa mhedzisiro. Midziyo yekurapa inopfekwa, senge matracker ekusimba uye mamonitor ehutano, shandisa masensa aya kuronda zviratidzo zvakakosha uye zviitiko zvemuviri.
Muchikamu cheaerospace, dzakatetepa-firimu kudzvanywa sensors dzinoshandiswa kune kabhini kudzvanywa kwekutarisa, kuve nechokwadi chakanyanya kudzvanywa kabhini yekunyaradza vatyairi uye kuchengeteka. Iwo zvakare anoshandiswa pakumisikidza hutano hwekutarisa, inokwanisa kuona zvinogona kuitika zvisati zvanyanya. Zvakare, aya masensa akakosha muspacecraft kudzora nharaunda masisitimu, kuve nechokwadi mamiriro akagadzikana evashandi nemidziyo.
Mumaindasitiri ekushandisa, dzakatetepa-firimu kudzvanywa sensors dzinoshandiswa kunyatso kudzora maitiro, kuve nechokwadi chekushanda kwakakwana uye kushanda nesimba. Marobhoti masisitimu anotsamira pane aya masensa kune tactile mhinduro uye kumanikidza kunzwa, kuwedzera mashandiro avo uye kugona. Maindasitiri ekuchengetedza masisitimu anoshandisawo akaonda-firimu kudzvanywa sensors kuona uye kupindura kune kudzvanywa shanduko, kudzivirira tsaona uye kuve nechokwadi chekuchengetedzwa kwevashandi.
Mibvunzo Inowanzo bvunzwa
Ndeapi mabhenefiti makuru eakaonda-firimu pressure sensors?
Mutete-firimu kudzvanywa sensors inopa yakanyanya kunzwa, miniaturization, uye yakakwidziridzwa kuvimbika, zvichiita kuti ive yakakodzera kune akasiyana maapplication. Kunzwa kwavo kwepamusoro kunovabvumira kuona shanduko yemaminiti ekumanikidza, iyo miniaturized dhizaini inoita kuti ive yakakodzera nzvimbo-inomanikidzirwa maapplication, uye kuvimbika kwakasimbiswa kunovimbisa kushanda kwakagadzikana kwenguva refu munzvimbo dzakaoma.
Ko dzakatetepa-firimu pressure sensors dzinosiyana sei nedzechinyakare sensors?
Masensa akaonda-firimu ane hunyanzvi, akaumbika, uye anogara akasimba kupfuura echinyakare ma sensors. Ivo vanopa kuita kurinani mukukumbira maapplication, vanokwanisa kushanda mukati mehupamhi hwetembiricha uye kumanikidza, uye vane hutsinye hwepamusoro uye kumhanya kwekupindura. Aya maitiro anoita kuti matete-firimu sensors akunde mune akawanda-akanyanya kudiwa maapplication.
Ndezvipi zvinhu zvinowanzoshandiswa mune dzakaonda-firimu pressure sensors?
Zvishandiso zvakajairika zvinosanganisira simbi segoridhe neplatinamu, semiconductors sesilicon, uye zvinhu zvepamberi senge graphene. Ndarama neplatinamu zvinoshandiswa zvakanyanya kune yavo yakanakisa conductivity uye corrosion kuramba mune sensor electrodes. Silicon inowanzo shandiswa mu semiconductor matete firimu nekuda kweakanaka ma mechanic properties uye zvemagetsi hunhu, nepo graphene inoonekwa seyakanakira sarudzo yeramangwana sensor zvinhu nekuda kweiyo yakatanhamara magetsi emagetsi uye simba remuchina.
Ndeapi maindasitiri anonyanyo batsirikana kubva kune dzakaonda-firimu pressure sensors?
Zvemotokari, zvekurapa, zvemuchadenga, zvemagetsi zvevatengi, uye maindasitiri otomatiki maindasitiri anobatsirwa zvakanyanya kubva kune dzakatetepa-firimu kumanikidza sensors. Muindasitiri yemotokari, masensa aya anoshandiswa kutarisisa kudzvanywa kwetayi uye manejimendi enjini; mune zvekurapa, dzinoshandiswa pakuongorora kweropa uye ma sensors anoiswa; muchikamu chemuchadenga, anoshandiswa kutarisisa kudzvanywa kwekabhini uye kutarisa kwehutano hwehutano; mumagetsi evatengi, vanosimudzira ruzivo rwemushandisi wemidziyo yakangwara; uye mumaindasitiri otomatiki, anoshandiswa kugadzirisa maitiro uye marobhoti.
Ndedzipi nzira dzekugadzira dzinoshandiswa kune dzakaonda-firimu pressure sensors?
Maitiro akajairika anosanganisira sputtering, chemical vapor deposition (CVD), physical vapor deposition (PVD), uye atomic layer deposition (ALD). Aya matekiniki anogona kunyatso kudzora ukobvu, kufanana, uye kuumbwa kwefirimu rakatetepa, kuve nechokwadi chekuita sensor uye kuvimbika. Sputtering inzira inoshandiswa nevakawanda yemuviri mhute deposition yekugadzira simbi matete mafirimu; CVD nePVD maitiro anowanzoshandiswa kuisa semiconductors uye insulating zvinhu; ALD inogona kudzora kukora kwemafirimu akaonda padanho reatomu, akakodzera kugadzirira mafirimu akaonda.
References:
1.Ohring, M. (2001). "Zvinhu Sayenzi yeMafirimu Matete." Academic Press.
Nguva yekutumira: Jun-28-2024